검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Moving species in Ti34Si23N43 oxidation Kacsich T, Nicolet MA Thin Solid Films, 349(1-2), 1, 1999 |
| 2 |
Growth and properties of W-Si-N diffusion barriers deposited by chemical vapor deposition Fleming JG, Roherty-Osmun E, Smith PM, Custer JS, Kim YD, Kacsich T, Nicolet MA, Galewski CJ Thin Solid Films, 320(1), 10, 1998 |
| 3 |
Oxidation of Thin Crn and Cr2N Films Analyzed via Nuclear-Reaction Analysis and Rutherford Backscattering Spectroscopy Kacsich T, Lieb KP Thin Solid Films, 245(1-2), 4, 1994 |