화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Atomic force microscopy studies of self-assembled Si1-xGex islands produced by controlled relaxation of strained films
Bashir R, Chao KJ, Kabir AE
Journal of Vacuum Science & Technology B, 19(2), 517, 2001
2 Tungsten silicide and tungsten polycide anisotropic dry etch process for highly controlled dimensions and profiles
Bashir R, Kabir AE, Hebert F, Bracken C
Journal of Vacuum Science & Technology B, 16(4), 2118, 1998