검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Enhancing a Hierarchical Parallel Electron-Beam Data Conversion Processor Toward 1 Gbit Memory Lithography Koyama K, Watanabe S, Saito T, Hara S, Murakami E, Magoshi S, Yano K, Suzuki H, Kabeya A, Ohki S, Fujii T, Sakamoto S Journal of Vacuum Science & Technology B, 13(6), 2508, 1995 |