화학공학소재연구정보센터
검색결과 : 13건
No. Article
1 Enhancing the surface properties and functionalization of polymethyl methacrylate with atomic layer-deposited titanium(IV) oxide
Shahmohammadi M, Pensa E, Bhatia H, Yang B, Jursich G, Takoudis CG
Journal of Materials Science, 55(36), 17151, 2020
2 Surface and subsurface film growth of titanium dioxide on polydimethylsiloxane by atomic layer deposition
Astaneh SH, Jursich G, Sukotjo C, Takoudis CG
Applied Surface Science, 493, 779, 2019
3 On the initial growth of atomic layer deposited TiO2 films on silicon and copper surfaces
Tao Q, Overhage K, Jursich G, Takoudis C
Thin Solid Films, 520(22), 6752, 2012
4 Atomic Layer Deposition of HfO2, TiO2, and HfxTi1-xO2 Using Metal (Diethylamino) Precursors and H2O
Tao QA, Kueltzo A, Singh M, Jursich G, Takoudis CG
Journal of the Electrochemical Society, 158(2), G27, 2011
5 Composition-Structure-Dielectric Property of Yttrium-Doped Hafnium Oxide Films Deposited by Atomic Layer Deposition
Tao Q, Jursich G, Majumder P, Singh M, Walkosz W, Gu P, Klie R, Takoudis C
Electrochemical and Solid State Letters, 12(9), G50, 2009
6 Atomic layer deposition of Y2O3 films on silicon using tris(ethylcyclopentadienyl) yttrium precursor and water vapor
Majumder P, Jursich G, Kueltzo A, Takoudis C
Journal of the Electrochemical Society, 155(8), G152, 2008
7 Nitridation and oxynitridation of Si to control interfacial reaction with HfO2
Katarnreddy R, Inman R, Jursich G, Soulet A, Takoudis C
Thin Solid Films, 516(23), 8498, 2008
8 ALD and characterization of aluminum oxide deposited on Si(100) using tris(diethylamino) aluminum and water vapor (vol 153, pg C701, 2006)
Katamreddy R, Inman R, Jursich G, Soulet A, Takoudis C
Journal of the Electrochemical Society, 154(4), S5, 2007
9 Atomic layer deposition of lanthana thin films using high-purity lanthanum amino precursors
Inman R, Schuetz SA, Silvernail CM, Balaz S, Dowben PA, Jursich G, McAndrew J, Belot JA
Materials Chemistry and Physics, 104(2-3), 220, 2007
10 Post deposition annealing of aluminum oxide deposited by atomic layer deposition using tris(diethylamino)aluminum and water vapor on Si(100)
Katamreddy R, Inman R, Jursich G, Soulet A, Nicholls A, Takoudis C
Thin Solid Films, 515(17), 6931, 2007