검색결과 : 2건
No. | Article |
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1 |
Comparison of Argon Electron-Cyclotron-Resonance Plasmas in 3 Magnetic-Field Configurations .2. Energy-Distribution of Argon Ions Junck KL, Getty WD Journal of Vacuum Science & Technology A, 12(3), 760, 1994 |
2 |
Comparison of Ar Electron-Cyclotron-Resonance Plasmas in 3 Magnetic-Field Configurations .1. Electron-Temperature and Plasma-Density Junck KL, Getty WD Journal of Vacuum Science & Technology A, 12(5), 2767, 1994 |