화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Comparison of Argon Electron-Cyclotron-Resonance Plasmas in 3 Magnetic-Field Configurations .2. Energy-Distribution of Argon Ions
Junck KL, Getty WD
Journal of Vacuum Science & Technology A, 12(3), 760, 1994
2 Comparison of Ar Electron-Cyclotron-Resonance Plasmas in 3 Magnetic-Field Configurations .1. Electron-Temperature and Plasma-Density
Junck KL, Getty WD
Journal of Vacuum Science & Technology A, 12(5), 2767, 1994