검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Characterization of magnetron-sputtered partially ionized deposition as a function of metal and gas species Allain MMC, Hayden DB, Juliano DR, Ruzic DN Journal of Vacuum Science & Technology A, 18(3), 797, 2000 |
| 2 |
Characterization of magnetron-sputtered partially ionized aluminum deposition Hayden DB, Juliano DR, Green KM, Ruzic DN, Weiss CA, Ashtiani KA, Licata TJ Journal of Vacuum Science & Technology A, 16(2), 624, 1998 |