검색결과 : 9건
| No. | Article |
|---|---|
| 1 |
Metal-Organic Frameworks for Food Safety Wang PL, Xie LH, Joseph EA, Li JR, Su XO, Zhou HC Chemical Reviews, 119(18), 10638, 2019 |
| 2 |
Role of chamber dimension in fluorocarbon based deposition and etching of SiO2 and its effects on gas and surface-phase chemistry Joseph EA, Zhou BS, Sant SP, Overzet LJ, Goeckner MJ Journal of Vacuum Science & Technology A, 26(3), 545, 2008 |
| 3 |
Effects of pore morphology on the diffusive properties of a porous low-kappa dielectric Joseph EA, Sant SP, Goeckner MJ, Overzet LJ, Peng HG, Gidley DW, Kastenmeier BEE Journal of Vacuum Science & Technology B, 25(5), 1684, 2007 |
| 4 |
Spectroscopic study of gas and surface phase chemistries of CF4 plasmas in an inductively coupled modified gaseous electronics conference reactor Zhou B, Joseph EA, Overzet LJ, Goeckner MJ Journal of Vacuum Science & Technology A, 24(1), 114, 2006 |
| 5 |
Effect of surface temperature on plasma-surface interactions in an inductively coupled modified gaseous electronics conference reactor Zhou BS, Joseph EA, Sant SP, Liu YH, Radhakrishnan A, Overzet LJ, Goeckner MJ Journal of Vacuum Science & Technology A, 23(6), 1657, 2005 |
| 6 |
Role of fluorocarbon film formation in the etching of silicon, silicon dioxide, silicon nitride, and amorphous hydrogenated silicon carbide Standaert TEFM, Hedlund C, Joseph EA, Oehrlein GS, Dalton TJ Journal of Vacuum Science & Technology A, 22(1), 53, 2004 |
| 7 |
Investigation and modeling of plasma-wall interactions in inductively coupled fluorocarbon plasmas Joseph EA, Zhou B, Sant SP, Overzet LJ, Goeckner MJ Journal of Vacuum Science & Technology A, 22(3), 689, 2004 |
| 8 |
Characterization of silicon-rich nitride and oxynitride films for polysilicon gate patterning. I. Physical, characterization Joseph EA, Gross C, Liu HY, Laaksonen RT, Celii FG Journal of Vacuum Science & Technology A, 19(5), 2483, 2001 |
| 9 |
Etching of xerogel in high-density fluorocarbon plasmas Standaert TEFM, Joseph EA, Oehrlein GS, Jain A, Gill WN, Wayner PC, Plawsky JL Journal of Vacuum Science & Technology A, 18(6), 2742, 2000 |