검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
The effect of pressure control on a thermally stable a-C : N thin film with low dielectric constant by electron cyclotron resonance-plasma Liu XW, Lin JH, Jong WJ, Shih HC Thin Solid Films, 409(2), 178, 2002 |
| No. | Article |
|---|---|
| 1 |
The effect of pressure control on a thermally stable a-C : N thin film with low dielectric constant by electron cyclotron resonance-plasma Liu XW, Lin JH, Jong WJ, Shih HC Thin Solid Films, 409(2), 178, 2002 |