검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Extreme ultraviolet holographic microscopy and its application to extreme ultraviolet mask-blank defect characterization Lee SH, Bokor J, Naulleau P, Jeong ST, Goldberg KA Journal of Vacuum Science & Technology B, 18(6), 2935, 2000 |
| 2 |
Actinic detection of sub-100 nm defects on extreme ultraviolet lithography mask blanks Jeong ST, Johnson L, Rekawa S, Walton CC, Prisbrey ST, Tejnil E, Underwood JH, Bokor J Journal of Vacuum Science & Technology B, 17(6), 3009, 1999 |
| 3 |
Nondestructive picosecond-ultrasonic characterization of Mo/Si extreme ultraviolet multilayer reflection coatings Pu NW, Bokor J, Jeong ST, Zhao RA Journal of Vacuum Science & Technology B, 17(6), 3014, 1999 |
| 4 |
At-wavelength detection of extreme ultraviolet lithography mask blank defects Jeong ST, Idir M, Lin Y, Johnson L, Rekawa S, Jones M, Denham P, Batson P, Levesque R, Kearney P, Yan PY, Gullikson E, Underwood JH, Bokor J Journal of Vacuum Science & Technology B, 16(6), 3430, 1998 |