검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Angular Impact Energy-Distributions of Argon Ions at the Powered Electrode of a Helicon Plasma Source Janes J Journal of Vacuum Science & Technology A, 12(1), 97, 1994 |
| No. | Article |
|---|---|
| 1 |
Angular Impact Energy-Distributions of Argon Ions at the Powered Electrode of a Helicon Plasma Source Janes J Journal of Vacuum Science & Technology A, 12(1), 97, 1994 |