검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
The Effects of Collimation on Intrinsic Stress in Sputter-Deposited Metallic Thin-Films Janacek T, Liu D, Dew SK, Brett MJ, Smy TJ Thin Solid Films, 253(1-2), 372, 1994 |
| 2 |
Properties of Titanium and Aluminum Thin-Films Deposited by Collimated Sputtering Liu D, Dew SK, Brett MJ, Janacek T, Smy T, Tsai W Thin Solid Films, 236(1-2), 267, 1993 |