검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Metal-containing release layers for use with UV-cure nanoimprint lithographic template materials Houle FA, Raoux S, Miller DC, Jahnes C, Rossnagel S Journal of Vacuum Science & Technology B, 26(4), 1301, 2008 |
| 2 |
Fluorinated diamondlike carbon templates for high resolution nanoimprint lithography Schvartzman M, Mathur A, Kang Y, Jahnes C, Hone J, Wind SJ Journal of Vacuum Science & Technology B, 26(6), 2394, 2008 |
| 3 |
Ta and TaN adhesion to high-temperature fluorinated polyimides. Surface and interface chemistry Lee KW, Simonyi E, Jahnes C Journal of Adhesion Science and Technology, 12(7), 773, 1998 |
| 4 |
Novel low k dielectrics based on diamondlike carbon materials Grill A, Patel V, Jahnes C Journal of the Electrochemical Society, 145(5), 1649, 1998 |