검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Simulating the mechanical response of electron-beam projection lithography masks Jachim AF, Chen CF, Engelstad RL, Lovell EG, Mangat PJS, Dauksher WJ Journal of Vacuum Science & Technology B, 18(6), 3248, 2000 |
| 2 |
Thin film stress mapping using an integrated sensor Schlax MP, Jachim AF, Engelsad RL, Lovell EG, Liddle JA, Novembre AE Journal of Vacuum Science & Technology B, 17(6), 2714, 1999 |