검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Low-temperature low-resistivity PEALD TiN using TDMAT under hydrogen reducing ambient Caubet P, Blomberg T, Benaboud R, Wyon C, Blanquet E, Gonchond JP, Juhel M, Bouvet P, Gros-Jean M, Michailos J, Richard C, Iteprat B Journal of the Electrochemical Society, 155(8), H625, 2008 |