검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Particle deposition control for various wafer surfaces in acidic solution with surfactant Nose M, Itano M, Ohmi T Particulate Science and Technology, 14(1), 27, 1996 |
| 2 |
Minimization of Particle Contamination During Wet-Processing of Si Wafers Itano M, Kezuka T, Ishii M, Unemoto T, Kubo M, Ohmi T Journal of the Electrochemical Society, 142(3), 971, 1995 |