검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Low-temperature synthesis of thermochromic vanadium dioxide thin films by reactive high power impulse magnetron sputtering Aijaz A, Ji YX, Montero J, Niklasson GA, Granqvist CG, Kubart T Solar Energy Materials and Solar Cells, 149, 137, 2016 |
| 2 |
High power pulsed magnetron sputtering of transparent conducting oxides Sittinger V, Ruske F, Werner W, Jacobs C, Szyszka B, Christie DJ Thin Solid Films, 516(17), 5847, 2008 |
| 3 |
Phase tailoring of Ta thin films by highly ionized pulsed magnetron sputtering Alami J, Eklund P, Andersson JM, Lattemann M, Wallin E, Bohlmark J, Persson P, Helmersson U Thin Solid Films, 515(7-8), 3434, 2007 |
| 4 |
Magnetron target designs to improve wafer edge trench filling in ionized metal physical vapor deposition Lu JQ, Yoon JH, Shin K, Park BG, Yang L Thin Solid Films, 515(4), 2452, 2006 |
| 5 |
Characterizations of CNx thin films made by ionized physical vapor deposition Tetard F, Djemia P, Besland MP, Tessier PY, Angleraud B Thin Solid Films, 482(1-2), 192, 2005 |