검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Effect of surface roughness and release layer on anti-adhesion performance of the imprint template Duan YG, Li YJ, Ding YC, Li DC Applied Surface Science, 257(8), 3220, 2011 |
| 2 |
Silicon template fabrication for imprint lithography with a very smooth side wall profile Kawata H, Matsue M, Kubo K, Yasuda M, Hirai Y Thin Solid Films, 517(14), 3862, 2009 |