검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Characterization of particle contamination in process steps during plasma-enhanced chemical vapor deposition operation Setyawan H, Shimada M, Imajo Y, Hayashi Y, Okuyama K Journal of Aerosol Science, 34(7), 923, 2003 |
| 2 |
Measurement of trapping behavior of dust particles during plasma process by suck-out method Kondo K, Imajo Y, Shimada M, Okuyama K KAGAKU KOGAKU RONBUNSHU, 29(4), 513, 2003 |