화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Simple Equipment Tolerant Reflectometry for Monitoring of Molecular-Beam Epitaxy and Metalorganic Chemical-Vapor-Deposition Growth
Bean JC, Peticolas LJ, Lum R, Mcdonald ML
Journal of Vacuum Science & Technology A, 14(3), 946, 1996
2 Cleaning of Silicon Surfaces by Hydrogen Multipolar Microwave Plasma Excited by Distributed Electron-Cyclotron-Resonance
Raynaud P, Pomot C
Journal of Vacuum Science & Technology B, 12(2), 574, 1994
3 Determination of Molecular-Beam Epitaxial-Growth Parameters by Ellipsometry
Droopad R, Kuo CH, Anand S, Choi KY, Maracas GN
Journal of Vacuum Science & Technology B, 12(2), 1211, 1994