검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Deuterium sintering of silicon-on-insulator structures: D diffusion and replacement reactions at the SiO2/Si interface Wallace RM, Chen PJ, Archer LB, Anthony JM Journal of Vacuum Science & Technology B, 17(5), 2153, 1999 |
| No. | Article |
|---|---|
| 1 |
Deuterium sintering of silicon-on-insulator structures: D diffusion and replacement reactions at the SiO2/Si interface Wallace RM, Chen PJ, Archer LB, Anthony JM Journal of Vacuum Science & Technology B, 17(5), 2153, 1999 |