검색결과 : 8건
| No. | Article |
|---|---|
| 1 |
Characteristics of electron traps in Si-doped Ga0.51In0.49P and electrical properties of modulation doped GaInP/InGaAs/GaAs heterostructures Besikci C, Civan Y Thin Solid Films, 338(1-2), 213, 1999 |
| 2 |
High density plasma damage in InGaP/GaAs and AlGaAs/GaAs high electron mobility transistors Lee JW, Pearton SJ, Ren F, Kopf RF, Kuo JM, Shul RJ, Constantine C, Johnson D Journal of the Electrochemical Society, 145(11), 4036, 1998 |
| 3 |
Dry-Etching of InGaP in Magnetron Enhanced BCl3 Plasmas Mclane GF, Wood MC, Eckart DW, Lee JW, Lee KN, Pearton SJ, Abernathy CR Journal of Vacuum Science & Technology A, 15(3), 622, 1997 |
| 4 |
Wet Chemical Etch Solutions for AlxGa1-Xp Lee JW, Santana CJ, Abernathy CR, Pearton SJ, Ren F Journal of the Electrochemical Society, 143(1), L1, 1996 |
| 5 |
High Ion Density Plasma-Etching of InGaP, Alinp, and AlGaP in CH4/H-2/Ar Lee JW, Pearton SJ, Santana CJ, Mileham JR, Lambers ES, Abernathy CR, Ren F, Hobson WS Journal of the Electrochemical Society, 143(3), 1093, 1996 |
| 6 |
Optimizing the Reactive Ion Etching of P-InGaP with CH4/H-2 by a 2-Level Fractional Factorial Design Process Chan RH, Cheng KY Journal of Vacuum Science & Technology B, 14(5), 3219, 1996 |
| 7 |
Dry-Etching of InGaP and Alinp in CH4/H-2/Ar Lee JW, Pearton SJ, Santana CJ, Lambers ES, Abernathy CR, Hobson WS, Ren F Plasma Chemistry and Plasma Processing, 16(3), 365, 1996 |
| 8 |
Wet Chemical Etching of Al0.5In0.5P Lee JW, Pearton SJ, Abernathy CR, Hobson WS, Ren F, Wu CS Journal of the Electrochemical Society, 142(6), L100, 1995 |