검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Ion-Implantation for Silicon Device Manufacturing - A Vacuum Perspective Current MI Journal of Vacuum Science & Technology A, 14(3), 1115, 1996 |
| 2 |
Review of Secondary-Ion Mass-Spectrometry Characterization of Contamination Associated with Ion-Implantation Stevie FA, Wilson RG, Simons DS, Current MI, Zalm PC Journal of Vacuum Science & Technology B, 12(4), 2263, 1994 |