검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Investigation of particle formation during the plasma enhanced chemical vapor deposition of amorphous silicon, oxide, and nitride films Rao NP, Wu Z, Nijhawan S, Ziemann P, Campbell S, Kittelson DB, McMurry P Journal of Vacuum Science & Technology B, 16(2), 483, 1998 |
| 2 |
Spatial-Distribution of Chemical-Components in Aerosol-Particles as Determined from Secondary-Electron Yield Measurements - Implications for Mechanisms of Multicomponent Aerosol Crystallization Ziemann PJ, Mcmurry PH Journal of Colloid and Interface Science, 193(2), 250, 1997 |