검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Uniform Surface Oxidation of an Si Substrate by a Planar Modulated Inductively Coupled Thermal Plasma with Molecular Gas Feed Tial MKS, Tanaka Y, Maruyama Y, Tsuchiya T, Uesugi Y, Ishijima T Plasma Chemistry and Plasma Processing, 37(3), 857, 2017 |
| 2 |
Two-Temperature Two-Dimensional Non Chemical Equilibrium Modeling of Ar-CO2-H-2 Induction Thermal Plasmas at Atmospheric Pressure Al-Mamun SA, Tanaka Y, Uesugi Y Plasma Chemistry and Plasma Processing, 30(1), 141, 2010 |
| 3 |
Observation of non-chemical equilibrium effect on Ar-CO2-H-2 thermal plasma model by changing pressure Al-Mamun SA, Tanaka Y, Uesugi Y Thin Solid Films, 518(3), 943, 2009 |