검색결과 : 3건
No. | Article |
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1 |
Modeling the effect of power on the growth properties of microcrystalline silicon films in the high-pressure depletion regime Li R, Chen XP, Chen YS, Hao XL, Lu JX, Yang SE Thin Solid Films, 562, 140, 2014 |
2 |
The study of the substrate temperature depended growth properties of microcrystalline silicon films deposited by VHF-PECVD method Chen YS, Chen XP, Hao XL, Lu JX, Yang SE Applied Surface Science, 270, 737, 2013 |
3 |
Modeling and experiments of microcrystalline silicon film deposited via VHF-PECVD Chen YS, Chen XP, Jiao YC, Hao XL, Lu JX, Yang SE Solar Energy, 94, 155, 2013 |