화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Modeling the effect of power on the growth properties of microcrystalline silicon films in the high-pressure depletion regime
Li R, Chen XP, Chen YS, Hao XL, Lu JX, Yang SE
Thin Solid Films, 562, 140, 2014
2 The study of the substrate temperature depended growth properties of microcrystalline silicon films deposited by VHF-PECVD method
Chen YS, Chen XP, Hao XL, Lu JX, Yang SE
Applied Surface Science, 270, 737, 2013
3 Modeling and experiments of microcrystalline silicon film deposited via VHF-PECVD
Chen YS, Chen XP, Jiao YC, Hao XL, Lu JX, Yang SE
Solar Energy, 94, 155, 2013