검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Structure and properties of high power impulse magnetron sputtering and DC magnetron sputtering CrN and TiN films deposited in an industrial scale unit Paulitsch J, Schenkel M, Zufrass T, Mayrhofer PH, Munz WD Thin Solid Films, 518(19), 5558, 2010 |