검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Spectroscopic ellipsometry optical critical dimension measurements of templates and imprinted resist for patterned magnetic media applications Yu ZN, Hwu J, Liu YD, Su ZP, Yang H, Wang HY, Hu W, Xu YA, Kurataka N, Hsu YZ, Lee SF, Gauzner G Journal of Vacuum Science & Technology B, 28(6), C6M130, 2010 |