검색결과 : 2건
No. | Article |
---|---|
1 |
Thermal stability of nonstoichiometric silicon nitride films made by reactive dc magnetron sputter deposition Lobl HP, Huppertz M Thin Solid Films, 317(1-2), 153, 1998 |
2 |
Nucleation and Growth in TiO2 Films Prepared by Sputtering and Evaporation Lobl P, Huppertz M, Mergel D Thin Solid Films, 251(1), 72, 1994 |