검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Properties of atomic-layer-deposited ultra-thin AIN films on GaAs surfaces Mattila P, Bosund M, Jussila H, Aierken A, Riikonen J, Huhtio T, Lipsanen H, Sopanen M Applied Surface Science, 314, 570, 2014 |
| 2 |
Evaluation of critical thickness of GaP0.98N0.02 layer on GaP substrate by synchrotron X-ray diffraction topography Jussila H, Nagarajan S, Sintonen S, Suihkonen S, Lankinen A, Huhtio T, Paulmann C, Lipsanen H, Tuomi TO, Sopanen M Thin Solid Films, 534, 680, 2013 |
| 3 |
Properties of AlN grown by plasma enhanced atomic layer deposition Bosund M, Sajavaara T, Laitinen M, Huhtio T, Putkonen M, Airaksinen VM, Lipsanen H Applied Surface Science, 257(17), 7827, 2011 |