검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Dry etching with gas chopping without rippled sidewalls Volland B, Hudek FS, Heerlein H, Rangelow IW Journal of Vacuum Science & Technology B, 17(6), 2768, 1999 |
| No. | Article |
|---|---|
| 1 |
Dry etching with gas chopping without rippled sidewalls Volland B, Hudek FS, Heerlein H, Rangelow IW Journal of Vacuum Science & Technology B, 17(6), 2768, 1999 |