화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 High-temperature stability of the mechanical and optical properties of Si-B-C-N films prepared by magnetron sputtering
Kalas J, Vernhes R, Hreben S, Vlcek J, Klemberg-Sapieha JE, Martinu L
Thin Solid Films, 518(1), 174, 2009
2 Magnetron sputtered Si-B-C-N films with high oxidation resistance and thermal stability in air at temperatures above 1500 degrees C
Vlcek J, Hreben S, Kalas J, Capek J, Zeman P, Cerstvy R, Perina V, Setsuhara Y
Journal of Vacuum Science & Technology A, 26(5), 1101, 2008