검색결과 : 2건
No. | Article |
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1 |
High-temperature stability of the mechanical and optical properties of Si-B-C-N films prepared by magnetron sputtering Kalas J, Vernhes R, Hreben S, Vlcek J, Klemberg-Sapieha JE, Martinu L Thin Solid Films, 518(1), 174, 2009 |
2 |
Magnetron sputtered Si-B-C-N films with high oxidation resistance and thermal stability in air at temperatures above 1500 degrees C Vlcek J, Hreben S, Kalas J, Capek J, Zeman P, Cerstvy R, Perina V, Setsuhara Y Journal of Vacuum Science & Technology A, 26(5), 1101, 2008 |