검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Estimation of surface kinetic parameters and two-dimensional simulation of InP pattern features during CH4-H-2 plasma etching Rhallabi A, Houlet L, Turban G Journal of Vacuum Science & Technology A, 18(4), 1366, 2000 |
| 2 |
Microscopic modeling of InP etching in CH4-H-2 plasma Houlet L, Rhallabi A, Turban G Journal of Vacuum Science & Technology A, 17(5), 2598, 1999 |