검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Defect analysis of Cl-2/HBr/He/O-2 etching process by imaging time-of-flight secondary ion mass spectrometry Zhao J, Reich DF, Nguyen TT, Zhao L, Hossain TZ Journal of Vacuum Science & Technology A, 18(1), 207, 2000 |
| 2 |
Effect of rapid thermal annealing temperature on the formation of CoSi studied by x-ray photoelectron spectroscopy and micro-Raman spectroscopy Zhao J, Ballast LK, Hossain TZ, Trostel RE, Bridgman WC Journal of Vacuum Science & Technology A, 18(4), 1690, 2000 |