검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Electron-Beam/Ultraviolet Hybrid Exposure Combined with Novel Bilayer Resist System for a 0.15-Mu-M T-Shaped Gate Fabrication Process Takano H, Nakano H, Minami H, Hosogi K, Yoshida N, Sato K, Hirose Y, Tsubouchi N Journal of Vacuum Science & Technology B, 14(6), 3483, 1996 |
| 2 |
Novel Wsi/Au T-Shaped Gate GaAs Metal-Semiconductor Field-Effect-Transistor Fabrication Process for Super Low-Noise Microwave Monolithic Integrated-Circuit Amplifiers Takano H, Hosogi K, Kato T, Oku T, Kohno Y, Nakano H, Sato K, Funada M, Ishihara O, Tsubouchi N Journal of Vacuum Science & Technology B, 13(3), 1014, 1995 |