화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 On determining the optical properties and layer structure from spectroscopic ellipsometric data using automated artifact minimization method
Budai J, Farkas B, Horvath ZL, Geretovszky Z
Thin Solid Films, 567, 14, 2014
2 Generation of Diffraction-Free Beams for Applications in Optical Microlithography
Erdelyi M, Horvath ZL, Szabo G, Bor Z, Tittel FK, Cavallaro JR, Smayling MC
Journal of Vacuum Science & Technology B, 15(2), 287, 1997