검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
SIMS depth profiling of boron ultra shallow junctions using oblique O-2(+) beams down to 150 eV Juhel A, Laugier F, Delille D, Wyon C, Kwakman LFT, Hopstaken A Applied Surface Science, 252(19), 7211, 2006 |
| No. | Article |
|---|---|
| 1 |
SIMS depth profiling of boron ultra shallow junctions using oblique O-2(+) beams down to 150 eV Juhel A, Laugier F, Delille D, Wyon C, Kwakman LFT, Hopstaken A Applied Surface Science, 252(19), 7211, 2006 |