검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Investigation of the ion dose non-uniformity caused by sheath-lens focusing effect on silicon wafers Holtzer N, Stamate E, Toyoda H, Sugai H Thin Solid Films, 515(12), 4887, 2007 |
| 2 |
Improvement of the dose uniformity in plasma immersed ion implantation by introducing a vertical biased ring Stamate E, Holtzer N, Sugai H Thin Solid Films, 506, 571, 2006 |