검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Wet-chemical etching of metals for advanced semiconductor technology nodes: Ru etching in acidic Ce4+ solutions Philipsen H, Mouwen N, Teck S, Monnens W, Le QT, Holsteyns F, Struyf H Electrochimica Acta, 306, 285, 2019 |
| 2 |
Superhydrophobic Breakdown of Nanostructured Surfaces Characterized in Situ Using ATR-FTIR Vrancken N, Sergeant S, Vereecke G, Doumen G, Holsteyns F, Terryn H, De Gendt S, Xu XM Langmuir, 33(15), 3601, 2017 |
| 3 |
A new technique to fabricate ultra-shallow-junctions, combining in situ vapour HCl etching and in situ doped epitaxial SiGe re-growth Loo R, Caymax M, Meunier-Beillard P, Peytier I, Holsteyns F, Kubicek S, Verheyen P, Lindsay R, Richard O Applied Surface Science, 224(1-4), 63, 2004 |