화학공학소재연구정보센터
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No. Article
1 Antiferroelectric Phase Transition in a Proton-Transfer Salt of Squaric Acid and 2,3-Dimethylpyrazine
Lengyel J, Wang XP, Choi ES, Besara T, Schonemann R, Ramakrishna SK, Holleman J, Blockmon AL, Hughey KD, Liu TH, Hudis J, Beery D, Balicas L, McGill SA, Hanson K, Musfeldt JL, Siegrist T, Dalal NS, Shatruk M
Journal of the American Chemical Society, 141(41), 16279, 2019
2 Low-temperature SiO2 layers deposited by combination of ECR plasma and supersonic silane/helium jet
Kovalgin AY, Isai G, Holleman J, Schmitz J
Journal of the Electrochemical Society, 155(2), G21, 2008
3 Low-temperature LPCVD of polycrystalline GexSi1-x films with high germanium content
Kovalgin A, Holleman J
Journal of the Electrochemical Society, 153(5), G363, 2006
4 Low-power, antifuse-based silicon chemical sensor on a suspended membrane
Kovalgin AY, Holleman J, Iordache G, Jenneboer T, Falke F, Zieren V, Goossens MJ
Journal of the Electrochemical Society, 153(9), H181, 2006
5 Atomic layer deposition of W1.5N barrier films for Cu metallization
Bystrova S, Aarnink AAI, Holleman J, Wolters RAM
Journal of the Electrochemical Society, 152(7), G522, 2005
6 Low hydrogen content silicon nitride films deposited at room temperature with an ECR plasma source
Isai GI, Holleman J, Wallinga H, Woerlee PH
Journal of the Electrochemical Society, 151(10), C649, 2004
7 Conduction and trapping mechanisms in SiO2 films grown near room temperature by multipolar electron cyclotron resonance plasma enhanced chemical vapor deposition
Isai GI, Holleman J, Wallinga H, Woerlee PH
Journal of Vacuum Science & Technology B, 22(3), 1022, 2004
8 Incubation-Time Measurements in Thin-Film Deposition
Rem JB, Holleman J, Verweij JF
Journal of the Electrochemical Society, 144(6), 2101, 1997
9 Diffusion and Electrical-Properties of Boron and Arsenic Doped Poly-Si and Poly-Gexsi1-X (X-Similar-to-0.3) as Gate Material for Sub-0.25 Mu-M Complementary Metal-Oxide-Semiconductor Applications
Salm C, Vanveen DT, Gravesteijn DJ, Holleman J, Woerlee PH
Journal of the Electrochemical Society, 144(10), 3665, 1997
10 Furnace and Rapid Thermal Crystallization of Amorphous Gexsi1-X and Si for Thin-Film Transistors
Rem JB, Deleuw MC, Holleman J, Verweij JF
Thin Solid Films, 296(1-2), 152, 1997