검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Temperature and Concentration Effects on Ozone Ashing of Photoresist Gardner WL, Baddorf AP, Holber WM Journal of Vacuum Science & Technology A, 15(3), 1409, 1997 |
| 2 |
Optimization of a Low Damage, High-Resolution Etch Process for Sinx in an ECR Reactor Olson RJ, Kazior TE, Lane B, Holber WM, Bourget L Journal of the Electrochemical Society, 143(1), 288, 1996 |