검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Uniformity in large area ZnO : Al films prepared by reactive midfrequency magnetron sputtering Hong RJ, Jiang X, Sittinger V, Szyszka B, Hoing T, Brauer G, Heide G, Frischat GH Journal of Vacuum Science & Technology A, 20(3), 900, 2002 |