검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Simulation of Uniformity and Lifetime Effects in Collimated Sputtering Tait RN, Dew SK, Tsai W, Hodul D, Smy T, Brett MJ Journal of Vacuum Science & Technology B, 14(2), 679, 1996 |
| No. | Article |
|---|---|
| 1 |
Simulation of Uniformity and Lifetime Effects in Collimated Sputtering Tait RN, Dew SK, Tsai W, Hodul D, Smy T, Brett MJ Journal of Vacuum Science & Technology B, 14(2), 679, 1996 |