검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Viscosity measurements of hydrogen at high temperatures up to 573 K by a curved vibrating wire method Sakoda N, Hisatsugu T, Furusato K, Shinzato K, Kohno M, Takata Y Journal of Chemical Thermodynamics, 89, 22, 2015 |
| 2 |
Low-dose exposure technique for 100-nm-diam hole replication in x-ray lithography Fujii K, Tanaka Y, Taguchi T, Yamabe M, Suzuki K, Gomei Y, Hisatsugu T Journal of Vacuum Science & Technology B, 16(6), 3504, 1998 |
| 3 |
130 nm and 150 nm line-and-space critical-dimension control evaluation using XS-1 x-ray stepper Tanaka Y, Taguchi T, Fujii K, Tsuboi S, Yamabe M, Suzuki K, Gomei Y, Hisatsugu T, Fukuda M, Morita H Journal of Vacuum Science & Technology B, 16(6), 3509, 1998 |