검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Atomic Layer Deposition of Ta-N-Based Thin Films Using a Tantalum Source Schmidt D, Knaut M, Hossbach C, Albert M, Dussarrat C, Hintze B, Bartha JW Journal of the Electrochemical Society, 157(6), H638, 2010 |
| 2 |
Properties of Plasma-Enhanced Atomic Layer Deposition-Grown Tantalum Carbonitride Thin Films Hossbach C, Teichert S, Thomas J, Wilde L, Wojcik H, Schmidt D, Adolphi B, Bertram M, Muhle U, Albert M, Menzel S, Hintze B, Bartha JW Journal of the Electrochemical Society, 156(11), H852, 2009 |