화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Vapor Phase Metal-Assisted Chemical Etching of Silicon
Hildreth OJ, Schmidt DR
Advanced Functional Materials, 24(24), 3827, 2014
2 3D Out-of-Plane Rotational Etching with Pinned Catalysts in Metal-Assisted Chemical Etching of Silicon
Hildreth OJ, Brown D, Wong CP
Advanced Functional Materials, 21(16), 3119, 2011
3 Directed 2D-to-3D Pattern Transfer Method for Controlled Fabrication of Topologically Complex 3D Features in Silicon
Rykaczewski K, Hildreth OJ, Wong CP, Fedorov AG, Scott JHJ
Advanced Materials, 23(5), 659, 2011