검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Heat Transfer between Wafer and Electrode in a High Density Plasma Etcher Im YH, Hahn YB Korean Journal of Chemical Engineering, 19(2), 347, 2002 |
| No. | Article |
|---|---|
| 1 |
Heat Transfer between Wafer and Electrode in a High Density Plasma Etcher Im YH, Hahn YB Korean Journal of Chemical Engineering, 19(2), 347, 2002 |