검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Properties of aluminum oxide thin films deposited by pulsed laser deposition and plasma enhanced chemical vapor deposition Cibert C, Hidalgo H, Champeaux C, Tristant P, Tixier C, Desmaison J, Catherinot A Thin Solid Films, 516(6), 1290, 2008 |
| 2 |
Physico-chemistry and morphology of silicon surface during the first stage of alumina deposition Jonnard P, Desmaison J, Hidalgo H, Rossignol F, Tixier C, Tristant P Applied Surface Science, 212, 674, 2003 |
| 3 |
Microwave plasma enhanced CVD of aluminum oxide films: OES diagnostics and influence of the RF bias Tristant P, Ding Z, Vinh QBT, Hidalgo H, Jauberteau JL, Desmaison J, Dong C Thin Solid Films, 390(1-2), 51, 2001 |