검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Characterization of WF6/N-2/H-2 plasma enhanced chemical vapor deposited WxN films as barriers for Cu metallization Li H, Jin S, Bender H, Lanckmans F, Heyvaert I, Maex K, Froyen L Journal of Vacuum Science & Technology B, 18(1), 242, 2000 |
| 2 |
Comparative-Study of the Interface Roughness of Ag/Au and Cu/Au Multilayers with Scanning-Tunneling-Microscopy and X-Ray-Diffraction Heyvaert I, Temst K, Vanhaesendonck C, Bruynseraede Y Journal of Vacuum Science & Technology B, 14(2), 1121, 1996 |