검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Low-Distortion Electron-Beam Lithography for Fabrication of High-Resolution Germanium and Tantalum Zone Plates David C, Kaulich B, Medenwaldt R, Hettwer M, Fay N, Diehl M, Thieme J, Schmahl G Journal of Vacuum Science & Technology B, 13(6), 2762, 1995 |