검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Fabrication of high aspect ratio Si nanogratings with smooth sidewalls for a deep UV-blocking particle filter Mukherjee P, Kang MG, Zurbuchen TH, Guo LJ, Herrero FA Journal of Vacuum Science & Technology B, 25(6), 2645, 2007 |